Plasma cleaning machine can remove stains on the surface of objects through "activation"

　　The plasma cleaning device is to set two electrodes in a sealed container to form an electric field, and use a vacuum pump to achieve a certain vacuum degree. As the gas becomes thinner and thinner, the molecular distance and the free movement distance of molecules or ions become longer and longer. Under the action of the electric field, they collide to form plasma. These ions are very active, and their energy is enough to destroy almost all chemical bonds and cause chemical reactions on any exposed surface. Plasmas of different gases have different chemical properties. For example, oxygen plasma has high oxidizing properties and can oxidize photoresist to generate gas, thereby achieving the cleaning effect; corrosive gas plasma has good anisotropy, which can meet the needs of etching.

Plasma cleaning relies on the "activation effect" of active particles in plasma to achieve the purpose of removing stains on the surface of objects. In terms of reaction mechanism, plasma cleaning usually includes the following processes: inorganic gas is excited to plasma state; gas phase substances are adsorbed on the solid surface; adsorbed groups react with solid surface molecules to generate product molecules; product molecules are resolved to form gas phase; reaction residues are separated from the surface. It effectively prevents secondary pollution caused by liquid flushing medium to the flushed object. The plasma scourer is connected to a vacuum pump. When working, the plasma in the scour chamber gently scours the surface of the scour object. A short scour can wash away organic pollutants. At the same time, the pollutants are pumped away by the vacuum pump. The scouring degree reaches the molecular level.

In addition to the super-scouring function, the scourer of the plasma cleaning machine can also change the surface properties of certain materials as needed under certain conditions. The plasma acts on the surface of the material to reorganize the chemical bonds of the surface molecules and form new surface properties. For some materials with special uses, the glow discharge of the plasma scourer during the super-scouring process not only enhances the adhesion, compatibility and wettability of these materials, but also can disinfect and sterilize. Plasma scourers are widely used in optics, optoelectronics, electronics, materials science, life science, polymer science, biomedicine, microfluidics and other fields.