There are many names for glue spin coaters. In English, they are called Spin Coater or Spin Processor. They are also called glue spinners, glue spreaders, spin coaters, spin film coaters, spin coaters, spin coaters, spin film coaters, spin coaters, spin film coaters, spin coaters, and film spreaders. In general, their principles are the same. They drip various glues on the high-speed rotating substrate, and use centrifugal force to evenly coat the glue dripped on the substrate on the substrate. The thickness varies depending on the viscosity coefficient between different glues and substrates, and is also related to the rotation speed and time.
How to choose a suitable glue spin coater?
There are many brands of glue spreaders in the market, so combined with my own practical experience in glue spreader technical services for many years. Help users improve their ability to distinguish and provide users with intuitive and clear selection criteria. From its principle, we can see several details that need to be paid attention to when purchasing a glue spreader:
1. Rotation speed: The speed and control accuracy are directly related to the thickness control and film uniformity of the spin coating layer. If the indicated speed and the actual speed of the motor have a large error, it is impossible for researchers who require precision coating to obtain accurate experimental data. Some domestic glue spreaders can only provide a speed range and cannot accurately calibrate the real-time speed. Although most imported glue spreaders can calibrate the speed, most of the speed accuracy is not recognized by international standards.
2. Structure of the vacuum adsorption system
The vacuum pump must be oil-free and the pressure must be accurately calibrated. The oil-free vacuum pumps produced domestically are really not good. Because any oil stains may block the vacuum pipeline, if the vacuum adsorption force is reduced, it will cause the substrate to be unable to adsorb and produce "flying pieces", and it will also cause the glue drop liquid to accidentally enter the vacuum pipeline system and cause complete blockage. Customers who have used domestic glue spreaders often care about how to clean them. Many foreign glue spreaders do a good job in this regard. They have a linkage mechanism. If the vacuum adsorption force is not enough, they will not start to rotate.
3. Material selection
For the application of semiconductor chemical industry, the selection of material is particularly critical. Most of the glue machines are made of stainless steel or ordinary plastic because the cost of this material is very low. Stainless steel is not very resistant to corrosion of various chemical glues, and plastic is easy to deform under high temperature and pressure. If this deformation causes the position of the tray to lose level, it will cause a bumpy state of sometimes high and sometimes low during spin coating. Naturally, a good spin coating effect cannot be obtained. At present, some foreign brands use natural polypropylene or polytetrafluoroethylene (Teflon) materials. These two materials have the advantages of green environmental protection, resource saving, light weight, high strength, good impact resistance, durability, natural pattern, and good gloss.
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