Sharing of operating experience of electron microscope plasma cleaning machine

Electron microscope plasma cleaning machine is a device used to clean and remove organic pollutants from the surface of electron microscope (EM) samples. Plasma is generated in a vacuum environment and the plasma beam is focused on the sample surface. The ions in the plasma beam have high energy. When they come into contact with the sample surface, ion impact and chemical reaction will occur, thereby removing organic pollutants and impurities on the surface.

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