CIF Remote SEM Plasma Cleaner (CIF-SEM）

Function & Features

 Intelligent interactive interface: Featuring a 7-inch color touchscreen, the system  supports bilingual operation in Chinese and English. It enables real-time monitoring and  automatic adjustment of process parameters. With 20 pre-programmed recipes, the  system allows for efficient storage and traceability of process data. 

 Reliable control system: It adopts PLC for full-process control and supports both  manual and automatic operation modes to ensure a stable and reliable cleaning  process. 

 Bidirectional intelligent vacuum control: The system can precisely control the vacuum  degree through two modes of adjusting gas flow or chamber pressure, providing more  flexible and intelligent process control to meet diverse precision processing  requirements. 

 Precise gas management: Equipped with mass flowmeters, it supports various gas  sources such as oxygen, argon, nitrogen, hydrogen and mixed gases, with high control  accuracy.

 Remote plasma cleaning source: Physically isolates the plasma from the sample,  effectively reducing direct bombardment. 

 High-efficiency and rapid cleaning: Significantly shorten the pretreatment time and  quickly remove contaminants such as hydrocarbons. 

 Extremely low sample damage: The optimized process can protect the original  structure and surface morphology of the sample to the greatest extent.