Product Parameters
Products Details

Core Features
1. Versatile Chamber Design: SUS304 stainless steel square chamber, meeting the preparation requirements of organic and metallic materials.
2. Stable Vacuum System: Combined molecular pump and mechanical pump equipped with pneumatic vacuum valves and dual digital display vacuum gauges for low and high vacuum. The vacuum pressure can be precisely regulated by adjusting the gas flow or chamber pressure for flexible process control.
3. High-precision Gas Control: Adopts mass flow meters, supporting oxygen, argon, nitrogen, hydrogen and mixed gases with high control accuracy.
4. Dual-channel Evaporation System: Equipped with 1 set of organic evaporation sources (temperature adjustable from 0 to 700 °C) plus 2 sets of metal evaporation sources. It enables simultaneous or sequential evaporation of organic materials (C60, BCP, etc.) and metallic materials (silver, aluminum, copper, etc.), ideal for multi-layer composite film fabrication.
5. Precise Substrate Control: The substrate stage is equipped with water cooling (heating function optional), with adjustable rotation speed of 0–60 r/min to guarantee film uniformity. The film thickness uniformity deviation is ≤ ±3%.
6. Intelligent Safety Control: Fully automatic control via PLC and a touch screen, with program interlock protection and fault alarm
functions for safe and reliable operation.
Applications
1. ScientifSScientific Research & Teaching: Serves for teaching experiments and basic thin film research in universities and research institutions, as well as exploratory experiments and new process development for enterprises, providing a stable platform for organic and metallic thin film preparation.
2. New Energy & Optoelectronics: Prepares organic/metal electrodes and functional thin films for perovskite solar cells, OLEDs, OPV cells and flexible electronic devices to boost device performance and process iteration.
3. Organic Electronics & Semiconductor Industry: Deposits organic and metallic thin films for organic field-effect transistors (OFETs), organic sensors and semiconductor devices, satisfying high-precision coating demands for micro-nano processing.
4. Advanced Material R&D: Fabricates organic optoelectronic materials, metal-organic composite films, catalytic films and biomedical films, promoting frontier research and technological innovation in material science.
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