CIF Microwave Plasma Cleaner

                                                               MPC 6                                                         MPC 24

Applications

1. Semiconductor Packaging: Chip pad cleaning, lead frame treatment

2. Optical Components: Surface cleaning and activation for lenses and optical fibers

3. Medical Implants: Surface treatment of surgical instruments and artificial joints

4. Automotive Electronics: Pre-treatment for sensors and bonding surfaces

5. Scientific Research & Experiments: Material surface modification, pre-treatment for nano-coating

Function & Features

1. Intelligent interactive interface: Featuring a 7-inch color touchscreen, the system supports bilingual operation in Chinese and   English. It enables real-time monitoring and automatic adjustment of process parameters. With 20 pre-programmed recipes, the system allows for efficient storage and traceability of process data.

2. Reliable control system: It adopts PLC for full-process control and supports both manual and automatic operation modes to 

ensure a table and reliable cleaning process.

3. Bidirectional intelligent vacuum control: The system can precisely control the vacuum degree through two modes of adjusting gas flow or chamber pressure, providing more flexible and intelligent process control to meet  diverse precision processing 

requirements.

4. Precise gas management: Equipped with dual Mass Flow Controllers (MFC) as standard, it supports various gas sources such as oxygen, argon, nitrogen, hydrogen and mixed gases, with high control accuracy.

5. Showerhead Gas Inlet System: It adopts a multi-channel gas intake design, effectively solving the uneven airflow issue of 

traditional single-hole intake and ensuring uniform and consistent processing results.

6. Clean and anti-pollution design: Equipped with gas backfill and purge function, and fitted with HEPA high-efficiency filters to       effectively prevent secondary pollution.

7. High-quality material structure: The vacuum chamber can be made of 316 stainless steel or quartz, and the entire vacuum 

pipeline system is made of 316 stainless steel, which is corrosion-resistant and pollution-free.

8. Humanized operation design:The control panel is ergonomically designed. Adopting top-control and bottom-chamber 

structure to save installation space.

9. Highly efficient and stable process: The treatment process is fast, uniform, and repeatable; the sample processing  temperature  is low, avoiding thermal damage and thermal oxidation.

10. Comprehensive safety protection: The power is automatically cut off when the door is opened, and it is equipped with 

multiple protection mechanisms such as controllable pressure relief to ensure the safety of operation and samples.