CIF Sputtering Deposition System

Function & Features

1. Intelligent touch control and data visualization.

A 7-inch color touchscreen supports Chinese and English for real-time monitoring and precise control of process parameters. It stores up to 20 recipe programs, ensuring data traceability and improved process standardization and repeatability.

2. Flexible operation with dual-mode compatibility.

The equipment, powered by a PLC control system, enables smooth switching between manual and automatic modes, meeting diverse application needs with greater operational flexibility.

3. Precise pressure regulation and broad compatibility.

The system integrates a Pirani vacuum gauge for precise measurement and control, automatically interlocking with the vacuum pump and proportional valve to maintain a stable vacuum under varying conditions.

4. Uniform coating performance and high consistency.

The sample stage offers adjustable rotational speed (0–50 rpm) and vertical height (15–50 mm), enhancing film uniformity, process consistency, and compatibility with various target materials.

5. Ergonomic design for user comfort.

The operation panel is angled at 60° based on ergonomic design, with a clear, intuitive interface for smooth and easy operation.

6. Low-temperature processing preserves sample integrity.

During coating, the sample temperature is kept at 40–50°C to prevent thermal damage and oxidation, preserving the sample's intrinsic properties.

7. Cleanroom-level contamination control.

The system features gas  backfill purging and a  HEPA filtration system to  minimize contaminants and ensure a clean, reliable coating environment.

8. Comprehensive safety protection.

Safety features include automatic power cutoff when the chamber door opens and multiple built-in safety mechanisms for enhanced protection and operational safety.